| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1889
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1651
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-208 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-208 |
| filingDate |
2016-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102461711-B1 |
| titleOfInvention |
Catalyst layer forming method, catalyst layer forming system and recording medium |
| abstract |
The catalyst adsorbed on the surface of the substrate is fixed to the substrate without leaving any residue in the concave portion of the substrate. The catalyst layer forming method includes a step of supplying a catalyst solution 32 to a substrate 2 having a concave portion 2a and adsorbing the catalyst 22A on the surface of the substrate and the inner surface of the concave portion to form a catalyst layer 22; 2) The process of rinsing the surface and the inside of the recessed part 2a with a rinse liquid, and the process of drying the board|substrate 2 surface and the inside of the recessed part 2a are provided. A fixing agent solution 34 containing a fixing agent is supplied to the substrate 2 so that the catalyst 22A on the surface of the substrate 2 is fixed to the substrate 2 by the fixing agent 22B. |
| priorityDate |
2015-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |