http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102457648-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-083 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-18 |
| filingDate | 2019-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102457648-B1 |
| titleOfInvention | Chemical solution for forming a water-repellent protective film, a method for preparing the same, and a method for producing a surface-treated body |
| abstract | The present invention provides a novel chemical solution for forming a water repellent protective film having a novel catalyst component having various basicities, a method for preparing the same, and a method for producing a surface treatment body using the chemical solution. The chemical for forming a water-repellent protective film of the present invention is a chemical for forming a water-repellent protective film for forming a water-repellent protective film on the surface of a wafer containing a silicon element on its surface, (I) a silylating agent, (II) at least one nitrogen-containing compound among compounds represented by the following general formulas [1] and [2], and (III) organic solvents. [Formula 24] [Formula 25] [In formulas [1] and [2], R 1 each independently represents a hydrogen atom, a -C≡N group, a -NO 2 group, and a hydrocarbon in which some or all of the hydrogen atoms may be substituted with a fluorine atom. It is selected from group, and although the said hydrocarbon group may have an oxygen atom and/or a nitrogen atom, when a nitrogen atom is included, it shall take an acyclic structure. R 2 is selected from a hydrogen atom, a -C≡N group, a -NO 2 group, an alkylsilyl group, and a hydrocarbon group in which some or all of the hydrogen atoms may be substituted with an elemental fluorine, and the hydrocarbon group is an oxygen atom and/ Alternatively, it may have a nitrogen atom, but when it contains a nitrogen atom, it assumes that it has an acyclic structure.] |
| priorityDate | 2018-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 319.