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filingDate 2017-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2022-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102454632-B1
titleOfInvention Resin composition and use thereof
abstract Provided are a resin composition and a method for forming a resist pattern that are excellent in pattern shape improvement, residue defect prevention, and watermark defect prevention properties. Resin A which contains a sulfonic acid group-containing structural unit in a content ratio exceeding 5 mol%, and the mass of fluorine atoms contained per unit mass is 30 mass% or less, and a resin in which the mass of fluorine atoms contained per unit mass is greater than that of Resin A A resin composition containing C and a solvent, wherein the content of the resin A is smaller than the content of the resin C.
priorityDate 2016-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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