http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102443481-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D9-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-00 |
| filingDate | 2016-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102443481-B1 |
| titleOfInvention | Solvent for Treating Polysilazane and Method for Treating Polysilazane |
| abstract | The present invention provides a solvent for treating polysilazane containing cyclopentane and ether, a method for reducing the amount of polysilazane used using the solvent, and a method for treating polysilazane. The polysilazane treatment solvent according to the present invention can improve polysilazane coating properties to significantly reduce the amount of polysilazane used and improve coating uniformity, and has excellent stability because gelation of waste liquid does not occur. |
| priorityDate | 2016-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.