| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67167 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2018-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102434297-B1 |
| titleOfInvention |
Substrate processing method and substrate processing apparatus |
| abstract |
Provided are a substrate processing method and a substrate processing apparatus capable of improving the problems of pattern collapse and particles. A substrate treatment method comprises: a surface modification step of modifying the surface of a substrate having an oxide on its surface to improve roughness of the surface; supplying a treatment liquid to the modified surface of the substrate; and a surface cleaning process of cleaning the surface of the substrate by a method, and a hydrophobization process of supplying a hydrophobizing agent to the cleaned surface of the substrate to make the surface of the substrate hydrophobic. |
| priorityDate |
2018-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |