| abstract |
An article may be protected from halide plasma by applying a rare earth-containing glaze to the surface of the article. The glaze may be a coating agent comprising 20 to 90 mol% of SiO 2 , 0 to 60 mol% of Al 2 O 3 , and 10 to 80 mol% of rare earth oxide and/or rare earth fluoride (REX), , SiO 2 +Al 2 O 3 +REX is 60 mol% or more. |