http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102430139-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-7088 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-24 |
| filingDate | 2015-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102430139-B1 |
| titleOfInvention | Pattern drawing device and pattern drawing method |
| abstract | A pattern writing apparatus comprises: a writing unit including a scanner for scanning a beam modulated in accordance with writing data in a main scanning direction on a substrate; A conveying mechanism having a reference pattern formed on at least a part of the supporting surface and moving the substrate in a sub-scan direction orthogonal to the main scanning direction, and receiving reflected light generated when the beam scans the surface of the conveying mechanism or the surface of the substrate Thus, a calibration detection system that outputs a detection signal whose intensity changes according to a reference pattern or a mark formed on the substrate, a beam scan start position determined based on the origin signal from the origin detector, and detection from the calibration detection system and a control unit that adjusts the drawing position of the pattern by the drawing unit based on the relationship with the scanning position of the beam determined based on the signal. |
| priorityDate | 2014-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544408 |
Total number of triples: 14.