http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102427976-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-0037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B3-0018 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-10 |
| filingDate | 2020-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102427976-B1 |
| titleOfInvention | Multi-focusing micrelens and method thereof |
| abstract | In the method of manufacturing a multifocal microlens according to a preferred embodiment of the present invention, S10) A first photoresist is applied and coated on one surface of a wafer, and the first photoresist is soft baked, and a single layer is formed on the wafer. forming a single layer; S20) exposing the single layer to the first pattern by UV light passing through the first photomask having the first pattern, thereby forming a micropost array according to the first pattern on the single layer; S30) applying and coating a second photoresist as a single layer, the second photoresist is soft baked to form a double layer; S40) By UV light passing through the second photomask having the second pattern, the double layer is exposed to a second pattern, which is a pattern overlapping part of the first pattern, so that the micropost array by the second pattern is doubled formed in a layer; S50) A developer is applied to one side of the wafer, and the first photoresist and the second photoresist are removed from the portions except for the first pattern and the second pattern by the developer. providing a plurality of microposts on one surface of the wafer; and S60) through thermal reflow for the plurality of microposts, including the step of forming the plurality of microposts into a plurality of lenses having different thicknesses and curvatures. In step S50, the plurality of microposts forms a micropost array by a first pattern and a micropost array by a second pattern, and in step S60, the plurality of lenses have the same diameter, different thicknesses and curvatures, and different focal lengths. It is desirable to form an array. |
| priorityDate | 2020-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.