http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102421834-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
filingDate | 2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2022-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2022-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-102421834-B1 |
titleOfInvention | Method of trimming resist pattern |
abstract | Step A of forming a positive resist film on a support, exposing the positive resist film to exposure and alkali development to form a first resist pattern having an alkali-insoluble region on its surface; step B of applying a resist trimming composition containing an acid, and heating the first resist pattern to which the resist trimming composition has been applied. a step C of changing solubility; and a step D of organic solvent development of the first resist pattern after heating to remove an alkali-insoluble region of the first resist pattern, wherein the resist trimming composition comprises an acid and a first resist pattern; A method for trimming a resist pattern, comprising a solvent that does not dissolve |
priorityDate | 2014-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 364.