| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2933-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-504 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-502
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate |
2019-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102419121-B1 |
| titleOfInvention |
Photoresist Patterning Process Supports Two-Step Phosphor-Deposition to Form LED Matrix Arrays |
| abstract |
A method for low temperature curing of silicon structures is described, comprising the steps of providing patterning photoresist structures on a substrate. The photoresist structures define at least one open area that can be at least partially filled with a condensation cured silicone system. Vapor catalytic deposition is used to accelerate the curing of the condensation cured silicone, and the photoresist structure is removed leaving free-standing or layered silicon structures. Phosphor-containing silicon structures that can be coated with a reflective metal or other material are made possible by this method. |
| priorityDate |
2018-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |