| abstract |
The Si-containing film forming composition comprises a catalyst and/or polysilane, and an NH-free, C-free, and Si-enriched perhydropolysilazane, wherein the perhydropolysilazane has a molecular weight ranging from approximately 332 Daltons to approximately 100,000 Daltons. has the formula [-N(SiH 3 )x(SiH 2 -) y ], where x=0, 1, or 2, and y=0, 1, or 2 when x+y=2; and x+ including NH-free repeat units having x=0, 1 or 2, and y=1, 2, or 3) when y=3). Also disclosed are synthetic methods and applications for using them. |