http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102410115-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C55-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C55-22 |
| filingDate | 2015-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102410115-B1 |
| titleOfInvention | Etchant composition for metal layer containing silver or silver alloy |
| abstract | The present invention relates to a composition of a silver or silver alloy-containing metal film etchant. According to the present invention, a carboxylic acid compound having 3 or more carbon atoms, the number of carbon atoms, the number of carboxyl groups, and the number of functional groups excluding carboxyl groups satisfying certain conditions is etched. By containing it as a rate control agent, it is possible to improve the etching characteristics during the etching process of the silver or silver alloy-containing metal film, thereby reducing the amount used for replacement and consumption of the etchant, and also preventing defects due to uneven etching. |
| priorityDate | 2015-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 71.