http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102390314-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L45-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D125-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L25-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate | 2020-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102390314-B1 |
| titleOfInvention | Resist composition and patterning process |
| abstract | [Problem] To provide a negative resist composition which is highly sensitive and capable of reducing the LWR or CDU of a pattern and capable of forming a good shape, and a resist pattern forming method using the composition. [Solutions] (A) a quencher comprising an onium salt represented by the following formula (A-1), (B) a base polymer comprising repeating units represented by the following formulas (B1) and (B2), and (C) A chemically amplified negative resist composition comprising a photoacid generator that generates an acid. (Wherein, R 1 to R 6 , Rf 1 to Rf 2 , R 11 , R 12 , R A , Rx, Ry, W 1 are a specific substituent, A 1 is a single bond or a linking group, and m is 1 to 5 , n is 0≤n≤5-m, p is 0~1, x 1 is 0~2, b and d are integers from 1 to 3. t 1 is 0 or 1. a is 0≤a≤5 It is an integer satisfying +2x 1 -b, and c is an integer satisfying 0≤c≤5+2x 1 -d.) |
| priorityDate | 2019-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 131.