| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20285 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 |
| filingDate |
2015-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102383571-B1 |
| titleOfInvention |
Automated sample-preparation device |
| abstract |
The charged particle beam device 10a generates the sample piece Q based on at least the sample piece holder P, the needle 18, and the previously acquired images of a plurality of charged particle beams of the sample piece Q. A computer 21 for controlling a plurality of charged particle beam irradiation optical systems, a needle 18 and a gas supply unit 17 so as to be moved to a predetermined position of the specimen holder P is provided. |
| priorityDate |
2014-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |