http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102371936-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01039 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02315 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2019-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102371936-B1 |
| titleOfInvention | Coating method of semiconductor parts with excellent plasma erosion resistance and mechanical properties |
| abstract | Disclosed is a method for coating a semiconductor component having excellent plasma erosion resistance and mechanical properties, which improves mechanical rigidity of semiconductor components with plasma erosion resistance by adding oxide particles as a reinforcing agent to a yttrium-based fluoride base. A method for coating a semiconductor component having excellent plasma erosion resistance and mechanical properties according to the present invention comprises the steps of: (a) preparing a semiconductor component; and (b) spray-coating a reinforcing agent together with yttrium-based fluoride on the surface of the semiconductor component, wherein the reinforcing agent comprises oxide particles. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102517083-B1 |
| priorityDate | 2019-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.