http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102369936-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-25 |
| filingDate | 2017-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102369936-B1 |
| titleOfInvention | Optical measuring method |
| abstract | An optical measurement method according to an embodiment of the present invention includes obtaining a raw optical signal by selecting a predetermined wavelength band from light reflected from a wafer on which a plurality of patterns are formed, and converting the raw optical signal into a frequency domain. converting; obtaining a first detection signal having a first frequency band and a second detection signal having a second frequency band different from the first frequency band from the raw optical signal converted into the frequency domain; and calculating a representative value representing the profiles of the plurality of patterns by using a first detection signal and calculating a dispersion value representing the profiles of the plurality of patterns by using the second detection signal. |
| priorityDate | 2017-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.