| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-021 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02614
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-0514
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-25 |
| filingDate |
2017-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102369434-B1 |
| titleOfInvention |
Bulk-acoustic wave resonator and method for manufacturing the same |
| abstract |
A substrate having a cavity forming groove formed thereon; a membrane layer formed on the substrate and having a convex portion; a lower electrode at least a portion of which is disposed on the convex portion; and an upper electrode formed on the piezoelectric layer, wherein a cavity is formed by a first space formed by the cavity forming groove and a second space formed by the convex portion, wherein the cavity forming groove is an active region Disclosed is a volume acoustic resonator disposed under the convex portion and the inclined surface formed on the convex portion is disposed outside the cavity forming groove. |
| priorityDate |
2017-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |