Predicate |
Object |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K11-7734 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K11-7728 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J11-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-70 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K11-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J11-04 |
filingDate |
2015-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2022-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2022-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-102367763-B1 |
titleOfInvention |
An agglutinat for pellicle, a pellicle using it and a method for evaluating pellicle |
abstract |
(Project) To provide an adhesive for a pellicle, which can easily and accurately evaluate the unevenness and undulation of the pressure-sensitive adhesive applied on a pellicle frame, and a pellicle and a pellicle evaluation method using the same. (Solution) An adhesive for pellicle for affixing a pellicle to a photomask, wherein a mechanoluminescent material is added to the adhesive. |
priorityDate |
2014-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |