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filingDate 2015-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2022-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102367763-B1
titleOfInvention An agglutinat for pellicle, a pellicle using it and a method for evaluating pellicle
abstract (Project) To provide an adhesive for a pellicle, which can easily and accurately evaluate the unevenness and undulation of the pressure-sensitive adhesive applied on a pellicle frame, and a pellicle and a pellicle evaluation method using the same. (Solution) An adhesive for pellicle for affixing a pellicle to a photomask, wherein a mechanoluminescent material is added to the adhesive.
priorityDate 2014-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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