| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2203-16 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-50 |
| filingDate |
2018-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102367516-B1 |
| titleOfInvention |
Silicon carbonaceous film forming composition comprising polycarbosilane and method for producing silicon carbonaceous film using the same |
| abstract |
[assignment] To provide a composition comprising a polycarbosilane capable of forming a film at a lower temperature and having excellent filling properties that make the produced film excellent in electrical properties. [Means of solving the task] A composition for forming a silicon carbonaceous film comprising a polycarbosilane and a solvent, wherein a ratio of the integrated intensity at 3.92 to 4.20 ppm to the integrated intensity at 3.60 to 5.50 ppm in the 1 H-NMR spectrum of the polycarbosilane is 27 to 50 % phosphorus, silicon carbonaceous film forming composition. |
| priorityDate |
2017-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |