http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102347711-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B7-228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B7-241 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B7-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 |
| filingDate | 2015-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102347711-B1 |
| titleOfInvention | Polishing pads and systems and methods of making and using the same |
| abstract | The present invention relates to a polishing pad comprising a polishing layer, wherein the polishing layer includes a working surface and a second surface opposite the working surface. The working surface includes a plurality of precisely shaped pores, a plurality of precisely shaped protrusions, and a land region. The present invention also relates to a polishing system comprising the aforementioned polishing pad and a polishing solution. The present invention relates to a method of polishing a substrate, the method comprising: providing a polishing pad according to any of the preceding polishing pads; providing a substrate; contacting the working surface of the polishing pad with the substrate surface; moving the polishing pad and the substrate relative to each other while maintaining contact between the working surface of the polishing pad and the substrate surface, wherein polishing is performed in the presence of a polishing solution. |
| priorityDate | 2014-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.