| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-0109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-056 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C7-00 |
| filingDate |
2020-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102345572-B1 |
| titleOfInvention |
gas auto supply apparatus of gas cylinder in adapted connector plug module |
| abstract |
The present invention relates to an automatic gas supply device for a gas cylinder that automatically supplies gas from a horizontal (recumbent position) gas cylinder transported toward a gas automatic supply device to a semiconductor manufacturing process, and in particular, It relates to an automatic gas supply device for a gas cylinder to which a connector plug module is applied to prevent pipe contamination and gas residues in the gas supply pipe from spreading to the outside. |
| priorityDate |
2020-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |