abstract |
The present invention relates to a surface treatment composition, which is used to treat the surface of a polished object having a layer containing tungsten and a phosphonic acid compound containing two or more nitrogen atoms, and having a pH of 6 or less, and water. it's about ADVANTAGE OF THE INVENTION According to this invention, when performing surface treatment, the means which can suppress the dissolution of the layer containing tungsten provided in the polished object to be polished is provided. |