http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102340755-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02359 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| filingDate | 2014-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102340755-B1 |
| titleOfInvention | System and methods for spin-on coating of self-assembled monolayers of periodic organosilicates on substrate |
| abstract | The present disclosure relates to a processing system for spin-coating a substrate with a molecular self-assembling (MSA) chemistry to form a photoresist film and/or a low-k film on the substrate. The spin coating processing system may include a spin coating chamber capable of receiving a substrate and capable of spin coating an MSA chemical to the substrate and an annealing chamber for thermally treating the substrate after the spin coating process. In certain embodiments, the spin coating processing system may also pre-treat or pre-wet the substrate prior to the spin coating process. |
| priorityDate | 2013-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.