http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102340520-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3784 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-37 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00 |
| filingDate | 2017-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102340520-B1 |
| titleOfInvention | Surface treatment composition and surface treatment method using the same |
| abstract | An object of the present invention is to provide a means capable of sufficiently removing foreign substances remaining on the surface of a polished object to be polished. The present invention relates to a (co)polymer comprising a structural unit A having a phosphonic acid group and a divalent (poly)oxyhydrocarbon group, or a salt thereof, and water, which occupies in all the structural units constituting the (co)polymer , the content rate of the structural unit A is more than 50 mol%, It relates to the surface treatment composition of the polished object. |
| priorityDate | 2016-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 139.