http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102332893-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22F3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B22F3-12 |
filingDate | 2015-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2021-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-102332893-B1 |
titleOfInvention | Method for a variety metal bonding on precious metals sputtering target decrease raw materials and the sputtering target prepared thereby |
abstract | The present invention relates to a sputtering target in which the amount of precious metal used is reduced by using a three-dimensional profile of the waste metal target used in the sputtering process, and a method for manufacturing the same. |
priorityDate | 2015-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.