http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102332390-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-327 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2017-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102332390-B1 |
| titleOfInvention | High-frequency power supply device and plasma processing device using same |
| abstract | An object of the present invention is to provide a high-frequency power supply device capable of reducing cost by downsizing the device and improving power efficiency by performing a stable matching operation, and a plasma processing device using the same. A plurality of high-frequency power supplies (61, 64) and matching devices (62, 65) are provided, and in the matching devices (62, 65), only a parallel-connected variable capacitance capacitor is provided to reduce the number of elements of the variable capacitance capacitor, The matching operation unit of the high frequency power supplies 61 and 64 determines the capacitance of the variable capacitance capacitors of the matching devices 62 and 65 so that the level of the reflected wave becomes small based on the traveling wave and the reflected wave detected by the detection circuit, A high frequency power supply device for adjusting and determining the oscillation frequency in the oscillation circuit of the high frequency power supplies 61 and 64 and a plasma processing device using the same are provided. |
| priorityDate | 2017-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24404 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559532 |
Total number of triples: 15.