http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102327590-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q20-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-02 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-02 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q40-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-02 |
filingDate | 2018-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2021-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-102327590-B1 |
titleOfInvention | Method and apparatus for inspecting the measuring tip of a scanning probe microscope |
abstract | The present invention relates to a method of inspecting the measuring tips 100 and 110 of a scanning probe microscope 520, the method comprising: (a) before the samples 400 and 510 are analyzed or in the measuring tips 100 and 110 generating at least one test structure (600, 650, 710, 730, 750, 770, 810, 850) after the sample has been analyzed by and (b) examining the measuring tip (100, 110) with the at least one generated test structure (600, 650, 710, 730, 750, 770, 810, 850). |
priorityDate | 2017-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.