http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102326717-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-84 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-38 |
| filingDate | 2017-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102326717-B1 |
| titleOfInvention | Compound, acid generator, polymer, resist composition and method of producing resist pattern |
| abstract | A compound represented by formula (I). [In formula (I), Q 1 and Q 2 each independently represent a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms. R 1 and R 2 each independently represent a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 6 carbon atoms. z represents any integer from 0 to 6, and when z is 2 or more, a plurality of R 1 and R 2 may be the same as or different from each other. X 1 represents *1-CO-O-, *1-O-CO-, -O-CO-O- or -O-, and *1 represents C(R 1 )(R 2 ) or C( Represents a binding site with Q 1 )(Q 2 ). A 1 represents a divalent hydrocarbon group having 2 to 36 carbon atoms which may have a substituent, -CH 2 - contained in the hydrocarbon group is substituted with -O-, -S-, -CO- or -SO 2 - there may be X 2 represents *2-CO-O-, -O-CO-O- or -O-, and *2 represents a binding site with A 1 . R 3 and R 4 each independently represent a hydrogen atom or a saturated hydrocarbon group having 1 to 6 carbon atoms. X 3 represents a group represented by any of the formulas (X 3 -1) to (X 3 -8). (Formula (X 3 -1) to formula (X 3 -8), * represents a binding site with C(R 3 )(R 4 ).) R 5 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. R 6 represents an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a substituent. R 7 represents a hydrocarbon group or cyano group having 1 to 12 carbon atoms which may have a substituent, and -CH 2 - contained in the hydrocarbon group is -O-, -S-, -SO 2 - or -CO- It may be substituted.] |
| priorityDate | 2016-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 225.