http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102325837-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-124 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-12 |
| filingDate | 2018-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102325837-B1 |
| titleOfInvention | Polymer and hardmask composition and method of forming patterns |
| abstract | A polymer comprising a substituted or unsubstituted moiety and a substituted or unsubstituted C6 to C30 aromatic moiety represented by the following Chemical Formula 1, a hardmask composition comprising the polymer, and a pattern forming method using the hardmask composition is about [Formula 1] In Formula 1, the definitions of X, Y, R 1 and R 2 are as described in the specification. |
| priorityDate | 2018-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 77.