http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102325074-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F2215-0052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F2003-04893 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F15-00292 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F15-00285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F15-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F3-04985 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F3-04503 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F15-0022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F15-00344 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F5-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F5-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F25-60 |
| filingDate | 2021-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102325074-B1 |
| titleOfInvention | Apparatus for mixing carbon dioxide to deionizer water |
| abstract | The present invention can maintain the purity of ultrapure water mixed with carbon dioxide at a desired purity, and to provide an apparatus for mixing carbon dioxide with ultrapure water, which can minimize the defect rate in nano processes, etc. by precisely controlling the purity hunting of ultrapure water There is this. An apparatus for mixing carbon dioxide into ultrapure water for implementing this includes an ultrapure water main supply line to which ultrapure water is supplied; a carbon dioxide supply line for supplying carbon dioxide to mix carbon dioxide with the ultrapure water supplied through the ultrapure water main supply line; a circulation line provided to supply the mixed water in which the carbon dioxide is mixed with the ultrapure water to a process device, and circulate the remaining mixed water supplied to the process device to supply it to the process device; a circulation pump provided on the circulation line and driven to circulate the mixed water; and a control unit for controlling the supply of the ultrapure water, the supply of the carbon dioxide, and the circulation of the mixed water. |
| priorityDate | 2021-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.