| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K2003-2244 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K9-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F214-262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-34924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-5419 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-5419
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K9-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J3-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L27-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F214-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-3492 |
| filingDate |
2021-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102323568-B1 |
| titleOfInvention |
Perfluoro elastomer composite with improved heat resistance, and method of fabricating the same |
| abstract |
The present invention relates to a perfluororubber composite with improved heat resistance used for sealing in a semiconductor process, and a method for manufacturing the same, by reforming zirconia particles with a perfluoroalkyl group to uniformly disperse the heat-resistant particle filler in a perfluororubber raw material, thereby performing even in high-temperature processes It relates to a perfluororubber that does not decrease and a method for manufacturing the same. |
| priorityDate |
2021-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |