http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102322248-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-113 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-113 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2019-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102322248-B1 |
| titleOfInvention | Method for producing silicon oxide having small molecule form, cleaning composition and method for cleaning substrate |
| abstract | The present invention provides a method for producing silicon oxide in a low molecular form. In an embodiment, a method for manufacturing silicon oxide in a low molecular form includes: mixing a first material and a second material containing silicon (Si) to form a mixture; producing a reactant from the mixture; extracting the reactant to produce an extract; and generating silicon oxide in a low molecular form from the extract. |
| priorityDate | 2019-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.