http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102320083-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-025 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-406 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-186 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B7-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-2003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02389 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-18 |
| filingDate | 2014-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102320083-B1 |
| titleOfInvention | SELF-STANDING GaN SUBSTRATE, GaN CRYSTAL, METHOD FOR PRODUCING GaN SINGLE CRYSTAL, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE |
| abstract | To provide a non-polar or semi-polar GaN substrate with improved size and crystal quality. In the freestanding GaN substrate, the angle between the normal of the main surface and the m-axis is 0 degrees or more and 20 degrees or less, and the size in the c-axis direction of the projected image when the main surface is vertically projected on the M-plane is 10 mm or more, In addition, when the a-axis length is measured on the intersection of the main surface and the A-plane, a low-strain section in which the section length is 6 mm or more and the a-axis length variation within the section is 10.0×10 -5 Å or less is observed. |
| priorityDate | 2013-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.