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filingDate 2015-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102317646-B1
titleOfInvention Semiconductor device and method for manufacturing the same
abstract The present invention relates to a semiconductor device including a field effect transistor, and more particularly, to a substrate having an active pattern thereon; and a separation structure crossing the active pattern and dividing the active pattern into a first region and a second region. In this case, the isolation structure may include a first insulating pattern filling a recess region defined between the first and second regions, and the first insulating pattern may have a concave upper surface.
priorityDate 2015-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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