http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102313239-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04 |
| filingDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102313239-B1 |
| titleOfInvention | Liquid composition and etching process using same |
| abstract | The present invention provides a liquid composition for etching copper or a metal compound containing copper as a main component formed on an oxide composed of indium, gallium, zinc and oxygen, and contacting it with a substrate having copper or a metal compound containing copper as a main component It relates to an etching method characterized in that. The liquid composition of the present invention is, (A) hydrogen peroxide, (B) acid, (C) fluorine ion source, (D) aminotri(methylenephosphonic acid), N,N,N',N'-ethylenediaminetetrakis ( at least one compound selected from the group consisting of methylenephosphonic acid), diethylenetriaminepenta(methylenephosphonic acid), bis(hexamethylene)triaminepenta(methylenephosphonic acid), and pentaethylenehexamineocta(methylenephosphonic acid) , (E) a hydrogen peroxide stabilizer, and (F) water, and a pH value of 5 or less. By using the liquid composition of the present invention, damage to an oxide composed of indium, gallium, zinc and oxygen is suppressed, and copper or a metal compound mainly composed of copper formed on an oxide composed of indium, gallium, zinc and oxygen is etched can do. |
| priorityDate | 2014-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 141.