http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102308500-B1

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filingDate 2021-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102308500-B1
titleOfInvention Semiconductor device
abstract The present invention provides a transistor in which a short-channel effect does not substantially occur even when a channel length is small and a switching characteristic is obtained. In addition, there is provided a semiconductor device having a high degree of integration to which the transistor is applied. A transistor using an oxide semiconductor film in which the short channel effect generated in a transistor using silicon does not substantially occur, and the channel length is 5 nm or more and less than 60 nm, and the channel width is 5 nm or more and less than 200 nm. At this time, the channel width is set to be 0.5 times or more and 10 times or less of the channel length.
priorityDate 2012-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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