http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102304791-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42376 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28114 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66 |
| filingDate | 2014-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102304791-B1 |
| titleOfInvention | Optimizing gate profile for performance and gate fill |
| abstract | Systems and methods for optimizing a gate profile for performance and gate filling are disclosed. A semiconductor device having an optimized gate profile includes a semiconductor substrate and a fin extending over the semiconductor substrate. A pair of source and drain regions is disposed on opposite sides of the channel region. A gate stack is disposed over the channel region, the gate stack including a top portion separated from a bottom portion by a tapered portion. At least a portion of the top portion and the tapered portion is disposed over the pin. |
| priorityDate | 2014-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 61.