http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102289074-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate | 2014-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2021-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-102289074-B1 |
titleOfInvention | Chemically amplified photosensitive resin composition and method for producing resist pattern using the same |
abstract | (Project) To provide a chemically amplified photosensitive resin composition for a thick film in which deterioration of the photographic properties over time is suppressed, and a method for producing a resist pattern using the same. (Solution Means) The chemically amplified photosensitive resin composition according to the present invention has a compound represented by the following formula (1) and/or a compound represented by the following formula (4), and an acid dissociable, dissolution inhibiting group, and is alkali by the action of an acid. Resin or alkali-soluble resin to which solubility with respect to increases, a photo-acid generator, and an organic solvent are contained, and solid content concentration is 40-65 mass %. In the formula, R 1 , R 2 and R 3 independently represent a hydrogen atom or an alkyl group, R 4 represents a group represented by the following formula (2) or (3), and R 5 and R 6 represent a monovalent hydrocarbon optionally having a substituent. represents the group. |
priorityDate | 2013-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 423.