http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102287213-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate | 2018-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102287213-B1 |
| titleOfInvention | Hardmask composition and hardmask layer and method of forming patterns |
| abstract | The present invention relates to a hardmask composition comprising a solvent and a graphene derivative having at least one anhydride group at the end of graphene, a hardmask layer comprising a cured product of the hardmask composition, and a pattern forming method using the hardmask composition. |
| priorityDate | 2018-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.