http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102287000-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate | 2018-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102287000-B1 |
| titleOfInvention | Metal chemical mechanical planarization (cmp) composition and methods therefore |
| abstract | Chemical mechanical planarization (CMP) formulations are provided that provide high, tunable Cu removal rates and low copper dishing for a wide range of or advanced node copper or through silica vias (TSV). The CMP composition provides high selectivity of Cu films to other barrier layers such as Ta, TaN, Ti, and TiN, and dielectric films such as TEOS, low-k, and ultra-low-k films. CMP polishing formulations include water; abrasive; single chelating agents, double chelating agents or tris chelating agents; morpholino class compounds such as Cu dish reducing agents. Additionally, organic quaternary ammonium salts, corrosion inhibitors, oxidizing agents, pH adjusting agents and biocides may be used in the formulation. |
| priorityDate | 2017-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 256.