| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B2203-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2018-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102278972-B1 |
| titleOfInvention |
Substrate processing method and substrate processing apparatus |
| abstract |
A substrate processing method includes a substrate holding step of holding a substrate having a surface exposed to metal, and supplying an inert gas to the vicinity of the surface of the substrate, thereby replacing an atmosphere around the surface of the substrate with an inert gas. an adjustment step of adjusting the pH of the rinse solution so that the metal forms an inert state that does not react with the rinse solution or the metal reacts with the rinse solution to form a passivation; and a rinse solution supply step of supplying the rinse solution whose pH is adjusted to the surface of the substrate after the surrounding atmosphere is replaced with an inert gas. |
| priorityDate |
2017-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |