http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102272719-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-062 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate | 2016-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102272719-B1 |
| titleOfInvention | Coating solution for resist pattern coating and pattern formation method |
| abstract | [Problem] To provide a novel coating liquid for coating a resist pattern. [Solutions] A polymer having a structural unit represented by the following formula (1), a primary, secondary or tertiary amine represented by the following formula (2), and the following formula ( 3) A coating liquid for coating a resist pattern comprising the ester represented by [(in formula (1), R 1 represents a hydrogen atom or a methyl group, and L is a divalent aromatic group optionally having at least one substituent, -C(=O)-O- group, or -C(=O)) represents a -NH- group, and X represents a hydrogen atom or a linear or branched alkyl or alkoxy group having 1 to 10 carbon atoms, wherein at least one hydrogen atom may be substituted with a halogen atom or a hydroxy group.) (In formula (2), R 2 , R 3 and R 4 each independently represent a hydrogen atom, a hydroxy group, or a linear, branched or cyclic organic group having 1 to 16 carbon atoms.) (Formula ( In 3), R 5 and R 6 each independently represent a linear or branched organic group having 1 to 16 carbon atoms.)] |
| priorityDate | 2015-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 104.