| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0278
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0136 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00349
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00944
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00166 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate |
2019-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2021-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102268359-B1 |
| titleOfInvention |
Micro-electro-mechanical system (mems) thermal sensor |
| abstract |
A structure of a micro-electro-mechanical system (MEMS) thermal sensor and a method of manufacturing the MEMS thermal sensor are disclosed. A method of manufacturing a MEMS thermal sensor includes forming on a substrate first and second sensing electrodes having first and second electrode fingers, respectively, and patterning with a rectangular cross-section between a pair of first electrode fingers. forming a layered layer. The first and second electrode fingers are formed in an interdigitated configuration and are suspended above the substrate. The method includes modifying a patterned layer to have a curved cross-section between a pair of first electrode fingers, forming a curved sensing element on the modified patterned layer to couple to the first pair of electrodes and removing the modified patterned layer. |
| priorityDate |
2018-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |