http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102265890-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate | 2015-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102265890-B1 |
| titleOfInvention | Etchant composition and manufacturing method of an array for liquid crystal display |
| abstract | The present invention relates to an etchant composition and a method for manufacturing an array substrate for a liquid crystal display. The etchant composition of the present invention is characterized in that a catalytic effect occurs as it contains a noble metal compound. Accordingly, the amorphous silicon layer containing the amorphous silicon and impurities etched through the conventional dry method is batch etched together with the upper metal wiring by a wet etching process. There are advantages to doing. |
| priorityDate | 2015-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 124.