http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102264071-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 2019-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102264071-B1 |
| titleOfInvention | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and program |
| abstract | It improves the quality of the cleaning process in the supply part which supplies the process gas with respect to a board|substrate. (a) supplying a first gas, either a cleaning gas or an additive gas reacting with the cleaning gas, from the supply unit toward the inside of the processing container after the substrate is processed by supplying a processing gas from the supply unit; (b) After stopping the supply of the first gas, a second gas, which is different from the first gas, of the cleaning gas and the additive gas, is supplied toward the inside of the processing container while a part of the first gas remains in the supply unit. , the inside of the supply unit is cleaned by performing a cycle including the step of supplying from the supply unit a predetermined number of times. |
| priorityDate | 2018-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 61.