http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102264002-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67173 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate | 2018-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102264002-B1 |
| titleOfInvention | Substrate processing apparatus, substrate processing method and recording medium |
| abstract | A substrate processing apparatus, a substrate processing method, and a storage medium for shortening the etching processing time are provided. A substrate processing apparatus according to an embodiment includes a substrate processing tank, a mixing unit, and a supply line. The substrate processing tank performs an etching process with an etchant. The mixing unit mixes the new liquid with the silicone-containing compound or the liquid containing the silicone-containing compound. The supply line supplies the mixed solution mixed by the mixing unit to the substrate processing tank. |
| priorityDate | 2017-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.