http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102263486-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2014-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102263486-B1 |
| titleOfInvention | Polishing composition |
| abstract | The present invention provides a polishing composition excellent in storage stability. The present invention includes an abrasive grain and an oxidizing agent containing a halogen atom, and the total number of silanol groups (A) (unit: pieces) of the abrasive grains in the polishing composition is calculated as the concentration of the oxidizing agent in the polishing composition (B) ( A polishing composition in which the value (A/B) divided by the unit: mass % is 8×10 23 or less. |
| priorityDate | 2013-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 422.