http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102249526-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4494 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4444 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B8-00 |
filingDate | 2014-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2021-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-102249526-B1 |
titleOfInvention | Method for manufacturing ultrasonic probe and ultrasonic probe |
abstract | It provides a method of manufacturing an ultrasonic probe. The method of manufacturing the ultrasonic probe includes: forming a sacrificial layer on a substrate, forming a plurality of openings spaced apart from each other in the sacrificial layer, forming a piezoelectric part by growing a piezoelectric element in each of the plurality of openings, and sacrificial And removing the layer. |
priorityDate | 2013-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.