http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102245661-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1333 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2015-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102245661-B1 |
| titleOfInvention | Etching solution composition for molybdenum-titanium layer or indium oxide layer and method for etching molybdenum-titanium layer or metal oxide layer using the same |
| abstract | The present invention relates to a molybdenum-titanium film or indium oxide film etchant composition and a method of manufacturing an array substrate for a liquid crystal display using the same, and more particularly, to a hydrogen peroxide, a fluorine compound, an azole compound, a sulfonic acid compound, a molybdenum containing polyhydric alcohol and water -It relates to a titanium film or indium oxide film etchant composition and a method of manufacturing an array substrate for a liquid crystal display using the same. |
| priorityDate | 2015-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 77.