| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0ba961bfb5c5b958381ba73241ed2ddf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2017-00526
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2017-2926
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2017-00225 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B25J13-084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-2287
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B17-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L5-228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B17-00234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B34-76 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B34-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B17-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L1-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25J13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L5-22 |
| filingDate |
2019-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a757352f56aaf1f9eb223040f5f0572d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d22cafed3cde7efb3716c289fbb145d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0eaa085359e1628d92b0b7ad08389fc1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_191853e5dc0957e4fb37f8f259fc12be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6456d584a5b4cb6bc2511a3f6a747e7f |
| publicationDate |
2021-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102241746-B1 |
| titleOfInvention |
Tactile sensor and Forcep sensor based crystal silicon nano membrane |
| abstract |
The present invention relates to a single crystal silicon nanomembrane-based tactile sensor, and a forceps sensor device for RMIS using the tactile sensor, and a method of manufacturing the same, and more particularly, to a step of transferring a single crystal silicon layer onto a polyimide (PI) film; Etching the silicon layer to generate a plurality of sensor units, and fabricating electrode wiring through a metallization process; Manufacturing a tactile sensor by coating PDMS on the PI film on which the sensor unit and the electrode wiring are formed; Coating and curing PDMS on the bump mold to produce a bump; Bonding the bump and the tactile sensor; Attaching a deformation layer to each of the inner surfaces of the pair of end effectors of the RMIS robot; And bonding a tactile sensor to which a bump is coupled to each of the deformable layers. It relates to a method of manufacturing a forceps sensor device for RMIS using a tactile sensor, comprising: a. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113280956-A |
| priorityDate |
2019-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |